Efficient Parametric Optimisation of Support Loss in MEMS beam resonators via an enhanced Rayleigh-Ritz method

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ژورنال

عنوان ژورنال: Journal of Physics: Conference Series

سال: 2012

ISSN: 1742-6588,1742-6596

DOI: 10.1088/1742-6596/382/1/012028