Efficient Parametric Optimisation of Support Loss in MEMS beam resonators via an enhanced Rayleigh-Ritz method
نویسندگان
چکیده
منابع مشابه
Effect of thermoelastic damping in nonlinear beam model of MEMS resonators by differential quadrature method
This paper presents a nonlinear model of a clamped-clamped microbeam actuated by an electrostatic load with stretching and thermoelastic effects. The frequency of free vibration is calculated by discretization based on the Differential Quadrature (DQ) Method. The frequency is a complex value due to the thermoelastic effect that dissipates energy. By separating the real and imaginary parts of fr...
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ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2012
ISSN: 1742-6588,1742-6596
DOI: 10.1088/1742-6596/382/1/012028